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The EWIN-TECH DEV-6LS Benchtop Semi-Automatic Developer is designed for the semiconductor, optoelectronics, and precision manufacturing fields, offering high-precision and reliable sample processing. It features precise speed control, an intelligent PLC system, and efficient chemical dispensing and cleaning, meeting the demands of micro-scale precision processes.
High-Precision Speed Control: Driven by an AC servo motor, providing a speed range of 20–3,000 RPM with ±1 RPM accuracy to ensure process stability.
Intelligent PLC Control: Equipped with a touchscreen and PLC supporting manual/auto modes. It stores up to 50 recipes (20 steps each) for streamlined operation and data management.
Chemical Dispensing System: A PLC-controlled dispensing arm accurately manages positions and speeds. High-precision nozzles combined with DI water cleaning ensure processing accuracy and cleanliness.
Safety Protection: Built-in vacuum detection with digital lower-limit protection prevents leakage and wafer fly-off. Audible alarms alert users upon cycle completion.
User-Friendly Interface: Intuitive touchscreen allows users to quickly set, monitor, and adjust parameters across various operating modes.
| Item | Specification |
| Model | DEV-6LS (Benchtop Semi-Auto) |
| Applicable Wafer Size | Up to 6 inches (Φ150mm) |
| Spin Speed Range | 20 ~ 3,000 RPM |
| Speed Accuracy | ±1 RPM |
| Control System | PLC with Color Touchscreen |
| Programming Function | 50 program groups, 20 steps per group |
| Motor Type | AC Servo Motor |
| Dispensing System | PLC-controlled arm with high-precision & DI water nozzles |
| Safety Features | Vacuum negative pressure detection & Lower-limit alarm |
| Chamber Material | Chemical-resistant PP or PTFE |
The DEV-6LS is widely used in the production and testing of semiconductors, solar cells, and optoelectronic devices. It is an ideal solution for cleaning, developing, and other fine chemical processes requiring high precision and reliability in manufacturing and R&D.
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