▍Product Profile

The EWIN-TECH CDS-6C Cabinet-style Integrated Coating, Baking, and Developing System is a high-precision equipment tailored for university research institutes and laboratories. It integrates spin-coating, baking, and developing functions within a single unit. Featuring a stainless steel or PP housing to ensure a particle-free environment, each module can operate independently. Equipped with a 7-inch touch interface and supporting FFU, top exhaust, and gravity waste discharge, the system simplifies workflows and enhances experimental efficiency for demanding temperature control and chemical dispensing requirements.

▍Technical Features

1. High-Precision Control: Coating speeds of 20–5,000 RPM with ±1 rpm accuracy; baking temperature accuracy of ±0.2°C ensures process stability.

2. Intelligent PLC System: Supports 50 recipes and 20 steps per group, featuring program storage and password protection for easy data management.

3. Modular Design: Coating, baking, and developing modules work independently, significantly increasing flexibility and throughput.

4. Precise Dispensing & Cleaning: PLC-controlled dispensing arm with ±1 RPM speed accuracy and DI water cleaning nozzles for delicate processing.

5. Optimized Operation: 7-inch touchscreen provides intuitive control for quick settings; compatible with various chuck specifications.

▍Technical Parameters

▍Typical Applications

This system is widely used in semiconductor, optoelectronics, solar cell, and precision manufacturing fields. It is specifically designed for sample processing and R&D in university labs. Its high-precision control and modularity effectively enhance R&D efficiency for fine chemical processes, including photoresist coating, baking, and developing.