▍Product Profile

The EWIN-TECH SCP-8C Cabinet-style Spin Coater is designed for pilot production and high-precision R&D, supporting substrates up to 8 inches. Featuring an integrated stainless steel cabinet, it combines spin-coating, dispensing, Edge Bead Removal (EBR), and Back Side Rinse (BSR). Equipped with an AC servo motor, PTFE chamber, leak-proof chuck, and FFU air purification, it optimizes stability, uniformity, and repeatability for semiconductor, optoelectronics, and micro-nanofabrication applications.

▍Technical Features

1. High-Stability Platform: Servo-driven speed from 20–5,000 rpm with ±1 rpm accuracy; supports up to 10,000 rpm/s acceleration for diverse processes.

2. Wide Compatibility: Standard 8-inch and 6-inch chucks support multiple wafer specifications for various experimental and pilot scenarios.

3. Precision Dispensing: Integrated Photoresist, EBR, and BSR modules with programmable swing-arm position and speed for better consistency.

4. Intelligent Control: PLC and touchscreen interface support 50 recipes with up to 20 steps each for complex workflows.

5. Superior Uniformity: Coating uniformity ≤±2%, ensuring film thickness consistency to improve lithography and etching yields.

6. Safety & Cleanliness: Features vacuum leak protection for the chuck, photoresist filtration, and a built-in FFU system for a secure, clean environment.

▍Technical Parameters

▍Typical Applications

The SCP-8C is ideal for R&D and pilot lines requiring strict coating thickness and uniformity. It is widely used for photoresist coating in semiconductor front-end processes, photosensitive material application in optoelectronics and MEMS, and thin/thick film processing for flexible electronics and advanced packaging.