▍Product Profile

The EWIN-TECH SCP-12LD is a high-performance benchtop spin coater designed for 12-inch wafers and large-sized substrates. It features a high-precision servo motor and PLC intelligent control for precise coating, photoresist processing, and surface treatment. Built with a robust stainless steel shell and a PTFE chamber, the system ensures stability, easy cleaning, and high efficiency. It includes vacuum pressure detection and protection systems to prevent wafer fly-off, making it ideal for both laboratory and mid-to-large scale production.

▍Technical Features

1. Large Substrate Support: Designed specifically for 12-inch wafers and large substrates.

2. High-Precision Servo Drive: Supports 20–5,000 rpm with ±1 rpm accuracy for superior uniformity.

3. Intelligent PLC Control: 7-inch touchscreen supports 50 recipes with up to 20 steps each.

4. Safety Protection: Includes vacuum detection and lower-limit protection to eliminate fly-off risks.

5. Easy Maintenance: Stainless steel and PTFE materials reduce particle adsorption and simplify cleaning.

6. Adjustable Dispensing: Manual dispensing device offers flexibility for diverse coating requirements.

▍Technical Parameters

▍Typical Applications

The SCP-12LD is widely used in semiconductor, solar cell, and optoelectronic industries for large-wafer photoresist coating and precision chemical treatment. It provides an efficient, stable solution that optimizes production processes, improves yield, and reduces material waste for high-precision manufacturing.