▍Product Profile

EWIN-TECH SCP-8LSY Desktop Semi-Automatic Syringe Coater is specifically designed for wafer-level coating process R&D and pilot production scenarios, suitable for processing 6-inch and 8-inch substrates. The equipment features a mirror-finish stainless steel shell with a compact structure, making it easy to integrate into laboratory environments. Equipped with a PLC automation control system and a full-color touch operation interface, it possesses powerful process editing, recipe management, and multi-stage parameter setting capabilities to precisely control the entire spin-coating process. It is ideal for the uniform spin-coating of materials such as photoresists and photosensitive adhesives, meeting the requirements for high consistency and repeatability.

▍Technical Features

1. Strong Adaptability: Supports 6" and 8" wafers, covering mainstream pilot and experimental substrate sizes.

2. Compact Structure: Small footprint, optimized for desktop use.

3. Precision Engineering: Mirror-finish stainless steel body, equipped with an exhaust piping system and adjustable feet to meet cleanroom and laboratory environment requirements.

4. Flexible Control System: Utilizes a PLC controller + touchscreen, supporting multiple operation modes (Process/Maintenance/Alarm/Edit/Recipe) for total control from a single screen.

5. High-Freedom Recipe Management: Supports memory for 50 groups of recipes, with up to 20 spin-coating steps per group; programmable parameters (acceleration/deceleration, time, etc.) meet the needs of complex process regulation.

6. Permission Management: Supports multi-level password permission settings to ensure critical parameters are controlled and traceable.

▍Technical Parameters

▍Typical Applications

This equipment is widely used in semiconductor front-end lithography processes, microelectronics MEMS structural coating development, flexible electronic material spin-coating, optoelectronic device preparation, and photosensitive material spin-coating processes. It is particularly suitable for scientific research laboratories, pilot lines, and university R&D platforms for the exploration and verification of high-precision and high-consistency spin-coating processes.